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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 4058-2009

 

Test method for detection of oxidation induced defects in polished silicon wafers

 
Issued Date:  

Implemented Date:

Issued by:   The Standardization Administration of the People's Republic of China
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GB Standard Code GB/T 4058-2009
Standard Category China National Standards
GB Standard English Title Test method for detection of oxidation induced defects in polished silicon wafers
GB Standard Chinese Title 硅抛光片氧化诱生缺陷的检验方法
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